Micro-Epsilon
lastmod 2026-03-27created 2026-03-272 edits
High-precision sensors, measuring devices, and systems. Micro-Epsilon offers industrial dimensional measuring devices and systems, including many kinds of high-precision displacement sensors, infrared temperature sensors, and color sensors.
About
As a leading manufacturer of precision sensor technology, we are shaping the future. Our systems are used wherever accuracy and performance are decisive for success. They are also used in machine building and automation, satellite technology, and the production of next-generation batteries and computer chips. As a globally active group of companies, we are making a decisive contribution to the world of tomorrow, and have been doing so for more than 56 years.
We strive to increase the precision of our products and drive innovation. Our displacement sensors achieve resolutions in the sub-nanometer range, smaller than one millionth of a millimeter. They are used, for example, in semiconductor lithography machines in ultra-high vacuum.
To bring this high performance into series products, we rely on a network of competencies within the group of companies. Consulting, product development, applications, electronics, optics, image processing, micromechatronics, simulation, software, system integration, production, and quality - all from a single source.
3D sensors
- Micro-Epsilon:surfaceCONTROL - 3D-Snapshot-Sensor
- Micro-Epsilon:reflectCONTROL for shiny surfaces
- Micro-Epsilon:scanCONTROL 3D laser scanners
- 3DInspect software
- Software integration
- Industrial Performance Unit
- 3D Profile Unit